Suspended micro/nano channel resonators: a review

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Suspended microchannel resonators for biomolecular detection

We have demonstrated a new approach for detecting biomolecular mass in the aqueous environment. Known as the suspended microchannel resonator (SMR), target molecules flow through a suspended microchannel and are captured by receptor molecules attached to the interior channel walls [1]. As with other resonant mass sensors, the SMR detects the amount of captured target molecules via the change in...

متن کامل

Fully suspended slot waveguide racetrack resonators

Optical slot waveguides fabricated on the silicon-on-insulator (SOI) platform enables direct light–matter interaction [1]. Its ring resonators are promising for trace-gas sensing [2], microparticle trapping [3], and nano-optomechanical mass and displacement measurements [4]. To date, slot ring/racetrack structures on buried oxide (BOX) have been adopted in the above applications. However, their...

متن کامل

Suspended microchannel resonators with piezoresistive sensors.

Precision frequency detection has enabled the suspended microchannel resonator (SMR) to weigh single living cells, single nanoparticles, and adsorbed protein layers in fluid. To date, the SMR resonance frequency has been determined optically, which requires the use of an external laser and photodiode and cannot be easily arrayed for multiplexed measurements. Here we demonstrate the first electr...

متن کامل

Electromechanical coupling and design considerations in single-layer MoS2 suspended-channel transistors and resonators.

We report on the analysis of electromechanical coupling effects in suspended doubly-clamped single-layer MoS2 structures, and the designs of suspended-channel field-effect transistors (FETs) and vibrating-channel nanoelectromechanical resonators. In DC gating scenario, signal transduction processes including electrostatic actuation, deflection, straining on bandgap, mobility, carrier density an...

متن کامل

Micromachined Resonators: A Review

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Journal of Micromechanics and Microengineering

سال: 2020

ISSN: 0960-1317,1361-6439

DOI: 10.1088/1361-6439/ab6df1